Summary and Outlook This document provides a metamodel for specifying a data specification template for defining concept descriptions for Units of Measure (UoM). The template includes a basic set of attributes to describe a Unit of Measure and reference to external dictionaries for further information. This document is part of the document series "Specification of the Asset Administration Shell". Additional parts of the document series cover (see [14]): the information model that is the basis for file exchange and interface payload definition (IDTA-01001, Part 1), interfaces and APIs for accessing the information of Asset Administration Shells (IDTA-01002, Part 2), security aspects including access control (IDTA-01004, part 4), a file exchange format AASX (IDTA-01005, Part 5). Future versions of this document with an extended set of attributes are in discussion.